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PVD Products’ provides a wide variety of custom physical vapor deposition systems.
Shown here is a dual chamber system including PLD and Magnetron sputtering connected via a dual wafer loadlock. PVD can provide combination systems like this or completely integrated custom systems specific to the customer requirements.
三腔室設計： PLD腔體+Sputter磁控濺射腔體+Load-lock樣品傳輸腔體
3 UHV Mags
3 x 15 cc ebeam
RHEED
Ellipsometer
100-mm wafers
850°C
RF Bias
<5 x 10-9Torr
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